MOCVI制备Nextel 720/SiO2复合材料

陈照峰; 张立同; 成来飞; 徐永东; 肖鹏

PDF(218 KB)

航空材料学报 ›› 2001, Vol. 21 ›› Issue (1) : 13-17.

扫码查看或转发全文

论文

MOCVI制备Nextel 720/SiO₂复合材料

作者信息 +

Nextel 720/silica composites by metal organic chemical vapor infiltration

Author information +

文章历史 +

摘要

研究了MOCVI(Metal Organic Chemical Vapor Infiltration)方法制备Nextel720/SiO2复合材料的工艺理论基础,分析了载气流量、先驱体TEOS(正硅酸乙酯)温度、沉积温度和氧气浓度对氧化硅基体沉积速率和Nextel720/SiO2复合材料显微结构的影响。结果表明,TEOS60℃,O2流量30ml·min-1,载气流量400ml·min-1,沉积温度600℃为复合材料最佳制备条件。

Abstract

The development of non-oxide ceramic matrix composite has resulted in composites with suitable property for certain structural application, but they all retain susceptible to long term degradation after high temperature exposure to oxidizing environments. Continuous oxide fibers reinforced oxide matrix composites are attractive for use as high temperature structural materials because they can combine composite properties with long-term oxidative stability. In this paper, the processing of Nextel 720/silica composites by MOCVI (metal organic chemical vapor infiltration) at atmosphere pressure is described. TEOS (Tetraethylorthosilicate) was used as precursor. The effects of concentration of O2, flux of carrier,temperature of TEOS and deposition temperature on deposition rate of silica and Nextel 720/silica microstructure were studied with lots of experiments. The results exhibit the optimal conditions for MOCVI are TEOS temperature 60℃, deposition temperature 600℃, flow rates of Ar and O2 400 ml·min-1 and 30 ml·min-1 respectively.

导出引用

陈照峰, 张立同, 成来飞, 徐永东, 肖鹏. MOCVI制备Nextel 720/SiO₂复合材料[J]. 航空材料学报, 2001, 21(1): 13-17

CHEN Zhao-feng, ZAHNG Li-tong, CHENG Lai-fei, XU Yong-dong, XIAO Peng. Nextel 720/silica composites by metal organic chemical vapor infiltration[J]. Journal of Aeronautical Materials, 2001, 21(1): 13-17

参考文献

JOHNSON S M, BLUM Y D, KANAZAWA C. H. Development and properties of an oxide fiber-oxide matrix composite [J]. Key Engineering Materials Vols. 1999,164-165: 85-90.
Schmucker M, SCHNEIDER H, CHAWLA K K, et al. Thermal degradation of fiber coatings in mullite-fiberreinforced mullite composites[J] J Am Ceram Soc 1997, 80(8):2136-40.
LEVI C. G, YANG J. Y, DALGLEISH B. J et al Processing and performance of all-oxide ceramic composite[J]. J. Am. Ceram. Soc. 1998, 81(8):2077-86.
HAANAPPEL V A C, CORBACH H D V, FRANSEN T, et al. Corrosion resistant coatings(Al2O3) proced by metal organic chemical vapor deposition using aluminiuntri-sec-butoxide[J]. Thin Solid Films. 1993, 230:138-144
孟广耀.化学气相淀积与无机新材料[M].北京:科学出版社.
徐永东.三维碳/碳化硅复合材料的制备与性能[M].西安:西北工业大学,1984.
REES W S. CVD of nonmetals[M]. VCH Verlagsge sellschaft mbH. 1996.
REES W S. CVD of nonmetals[M]. VCH Verlagsge sellschaft mbH. 1996.