电子束物理气相沉积Ni-Cr-Al合金薄板微观组织研究

关春龙; 单英春; 赫晓东

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航空材料学报 ›› 2009, Vol. 29 ›› Issue (5) : 7-10.

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论文

电子束物理气相沉积Ni-Cr-Al合金薄板微观组织研究

关春龙;单英春;赫晓东

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Microstructure of As-Deposited Ni-Cr-Al Alloy Thin Sheet by EBPVD

GUAN Chun-long;SHAN Ying-chun;HE Xiao-dong

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摘要

采用电子束物理气相沉积技术(EB-PVD)在温度为700℃的不锈钢基片上沉积厚度为0.2mm的Ni-Cr-Al高温合金薄板,然后将合金薄板与基片剥离。采用X射线衍射(XRD)、扫描电子显微镜(SEM)、原子力显微镜(AFM)和透射电子显微镜(TEM)等测试手段研究了Ni-Cr-Al合金薄板的微观组织。结果表明,沿厚度方向合金具有两种不同晶粒形貌的两层结构,在沉积材料的靠近基板侧观察到柱状晶区,同时表现出{111}织构,而在远离基板一侧晶粒形貌则为近等轴晶且无织构现象;合金表面晶粒细小均匀且呈岛状分布,每个"岛屿"由许多晶粒尺寸约为100 nm柱状晶粒组成;晶粒内部亚结构表现为孪晶。

Abstract

Ni-Cr-Al alloy thin sheet with 0.2mm in thickness was deposited on a stainless substrate with 700℃ from a target of Ni-Cr-Al alloy by EB-PVD,and then was removed from the substrate.The thin sheet was characterized by scanning electronic microscopy(SEM),X-ray diffraction(XRD),atomic force microscopy(AFM) and transmission electron microscopy(TEM).It is found that the alloy consists of a two layer structure with different pattern along cross-section direction.Columnar crystals are formed on the substrate side,exhibiting a strong {111} texture,while the equiaxed crystals are dominant on the evaporation side with no textures.Fine and uniform crystals,growing island-likely,are observed on the surface of the as-deposited alloy sheet,and each island consists of a lot of columnar crystals with about 100nm size.A high density of twins is visible within the grains.

导出引用

关春龙;单英春;赫晓东. 电子束物理气相沉积Ni-Cr-Al合金薄板微观组织研究[J]. 航空材料学报, 2009, 29(5): 7-10

GUAN Chun-long;SHAN Ying-chun;HE Xiao-dong. Microstructure of As-Deposited Ni-Cr-Al Alloy Thin Sheet by EBPVD[J]. Journal of Aeronautical Materials, 2009, 29(5): 7-10

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