（100）/（111）面金刚石膜抗氧等离子刻蚀能力
孙祁, 汪建华, 程翀, 陈祥磊, 吴荣俊, 刘单, 祝娇
Resistance abilities of （100）/（111）-faceted diamond films against oxygen plasma etching
Qi SUN, Jianhua WANG, Chong CHENG, Xianglei CHEN, Rongjun WU, Dan LIU, Jiao ZHU
航空材料学报
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2019, (2): 55
-60
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DOI: 10.11868/j.issn.1005-5053.2018.000016
