退火工艺对磁控溅射LiCoO2薄膜形貌与力学性能的影响
马一博, 陈牧, 颜悦, 张晓锋, 刘伟明, 李佳明, 张旋
Effects of annealing process on morphology and mechanical properties of magnetron sputtered LiCoO2 thin films
Yibo MA, Mu CHEN, Yue YAN, Xiaofeng ZHANG, Weiming LIU, Jiaming LI, Xuan ZHANG
航空材料学报
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2019, (6): 90
-98
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DOI: 10.11868/j.issn.1005-5053.2019.000091
