Al2O3薄膜制备工艺对高温阻挡性能的影响
刘鹏瑞, 鲍天骄, 张桐, 张亚发, 王浩森
Effect of preparation process of aluminum oxide thin films on high temperature barrier performance
LIU Pengrui, BAO Tianjiao, ZHANG Tong, ZHANG Yafa, WANG Haosen
航空材料学报
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2025, (4): 37
-44
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DOI: 10.11868/j.issn.1005-5053.2025.000060
