溅射工艺对D/M/D结构中SiN<sub><i>x</i></sub>介质膜光学常数的影响

孙瑶, 汪洪

Influence of Sputter Parameters on Optical Constants of SiN_x Dielectric Film in D/M/D Structures

Yao SUN, Hong WANG

航空材料学报 . 2015, (4): 28 -33 . DOI: 10.11868/j.issn.1005-5053.2015.4.005