溅射工艺对TiAlN薄膜摩擦学性能的影响

罗飞;何欣;杨会生;高克玮;王燕斌

Effect of Processing Condition on the Tribological Property of Sputtered TiAlN Thin Films

LUO Fei;HE Xin;YANG Hui-sheng;GAO Ke-wei;WANG Yan-bin

. 2007, (2): 33 -36 .