退火气氛对ZnO∶Al薄膜光学、电学和微结构的影响
郝常山, 彭晶晶, 雷沛, 钟艳莉, 张旋, 纪建超, 霍钟祺
Effect of annealing atmosphere on optical, electrical properties and microstructure of ZnO∶Al films
Changshan HAO, Jingjing PENG, Pei LEI, Yanli ZHONG, Xuan ZHANG, Jianchao JI, Zhongqi HUO
航空材料学报
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2021, (4): 134
-140
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DOI: 10.11868/j.issn.1005-5053.2021.000001
