薄膜应力测量方法及影响因素研究进展
马一博, 陈牧, 颜悦, 刘伟明, 韦友秀, 张晓锋, 李佳明
Research Progress on Measurement Methods and Influence Factors of Thin-film Stress
Yibo MA, Mu CHEN, Yue YAN, Weiming LIU, Youxiu WEI, Xiaofeng ZHANG, Jiaming LI
航空材料学报
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2018, (1): 17
-25
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DOI: 10.11868/j.issn.1005-5053.2017.000126
