Influence of Bias Voltage on Microstructure and Properties of Magnetron Sputtering TiB2 Coating

GU Wen-cui;LI Shou-de;WANG Huai-yong;CHEN Chun-li;LI Peng;HUANG Feng

Journal of Aeronautical Materials ›› 2014, Vol. 34 ›› Issue (5) : 37-42.

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Journal of Aeronautical Materials ›› 2014, Vol. 34 ›› Issue (5) : 37-42. DOI: 10.11868/j.issn.1005-5053.2014.5.006

Influence of Bias Voltage on Microstructure and Properties of Magnetron Sputtering TiB2 Coating

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2014, 34(5): 37-42 https://doi.org/10.11868/j.issn.1005-5053.2014.5.006

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