Research Progress on Measurement Methods and Influence Factors of Thin-film Stress

MA Yibo, CHEN Mu, YAN Yue, LIU Weiming, WEI Youxiu, ZHANG Xiaofeng, LI Jiaming

Journal of Aeronautical Materials ›› 2018, Vol. 38 ›› Issue (1) : 17-25.

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Journal of Aeronautical Materials ›› 2018, Vol. 38 ›› Issue (1) : 17-25. DOI: 10.11868/j.issn.1005-5053.2017.000126

Research Progress on Measurement Methods and Influence Factors of Thin-film Stress

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2018, 38(1): 17-25 https://doi.org/10.11868/j.issn.1005-5053.2017.000126

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