Resistance abilities of (100)/(111)-faceted diamond films against oxygen plasma etching

Qi SUN, Jianhua WANG, Chong CHENG, Xianglei CHEN, Rongjun WU, Dan LIU, Jiao ZHU

Journal of Aeronautical Materials ›› 2019, Vol. 39 ›› Issue (2) : 55-60.

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Journal of Aeronautical Materials ›› 2019, Vol. 39 ›› Issue (2) : 55-60. DOI: 10.11868/j.issn.1005-5053.2018.000016

Resistance abilities of (100)/(111)-faceted diamond films against oxygen plasma etching

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2019, 39(2): 55-60 https://doi.org/10.11868/j.issn.1005-5053.2018.000016

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