Research progress on SiCN ceramic prepared at low temperature by chemical vapor deposition

Yangyang MU, Jianyong TU, Jimei XUE, Fang YE, Laifei CHENG

Journal of Aeronautical Materials ›› 2019, Vol. 39 ›› Issue (3) : 1-9.

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Journal of Aeronautical Materials ›› 2019, Vol. 39 ›› Issue (3) : 1-9. DOI: 10.11868/j.issn.1005-5053.2018.000132
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Research progress on SiCN ceramic prepared at low temperature by chemical vapor deposition

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2019, 39(3): 1-9 https://doi.org/10.11868/j.issn.1005-5053.2018.000132

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