Effects of annealing process on morphology and mechanical properties of magnetron sputtered LiCoO2 thin films

Yibo MA, Mu CHEN, Yue YAN, Xiaofeng ZHANG, Weiming LIU, Jiaming LI, Xuan ZHANG

Journal of Aeronautical Materials ›› 2019, Vol. 39 ›› Issue (6) : 90-98.

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Journal of Aeronautical Materials ›› 2019, Vol. 39 ›› Issue (6) : 90-98. DOI: 10.11868/j.issn.1005-5053.2019.000091
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Effects of annealing process on morphology and mechanical properties of magnetron sputtered LiCoO2 thin films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2019, 39(6): 90-98 https://doi.org/10.11868/j.issn.1005-5053.2019.000091

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