A MICROWAVE PLASMA CVD SYSTEM FOR SYNTHESIS OF DIAMOND FILM

Huo Xiao;Ren Jialie;Lu Anli

Journal of Aeronautical Materials ›› 1994, Vol. 14 ›› Issue (3) : 42-47.

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PDF(350 KB)
Journal of Aeronautical Materials ›› 1994, Vol. 14 ›› Issue (3) : 42-47.

A MICROWAVE PLASMA CVD SYSTEM FOR SYNTHESIS OF DIAMOND FILM

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 1994, 14(3): 42-47

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