Oxidation behavior of copper thin films by ion implantation

WANG Xiao-zhen;WANG Er-min;ZHAO Xin-qing

Journal of Aeronautical Materials ›› 1999, Vol. 19 ›› Issue (4) : 22-26.

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PDF(204 KB)
Journal of Aeronautical Materials ›› 1999, Vol. 19 ›› Issue (4) : 22-26.

Oxidation behavior of copper thin films by ion implantation

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 1999, 19(4): 22-26

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