Effect of Processing Condition on the Tribological Property of Sputtered TiAlN Thin Films

LUO Fei;HE Xin;YANG Hui-sheng;GAO Ke-wei;WANG Yan-bin

Journal of Aeronautical Materials ›› 2007, Vol. 27 ›› Issue (2) : 33-36.

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Journal of Aeronautical Materials ›› 2007, Vol. 27 ›› Issue (2) : 33-36.

Effect of Processing Condition on the Tribological Property of Sputtered TiAlN Thin Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2007, 27(2): 33-36

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