Influences of the Process on Thickness Uniformity of Films Deposited by Magnetron Sputtering

WEN Pei-gang;YAN Yue;ZHANG Guan-li;WANG Yong-lin

Journal of Aeronautical Materials ›› 2007, Vol. 27 ›› Issue (3) : 66-68.

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PDF(301 KB)
Journal of Aeronautical Materials ›› 2007, Vol. 27 ›› Issue (3) : 66-68.

Influences of the Process on Thickness Uniformity of Films Deposited by Magnetron Sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2007, 27(3): 66-68

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