Preparation and Performance Study of Polyfluorin Thin Film by Radio Frequency Magnetron Sputtering Method

GAO Yuan;QIN Xiao-gang;GUO Yun;LIU Hui-tao

Journal of Aeronautical Materials ›› 2009, Vol. 29 ›› Issue (5) : 61-65.

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Journal of Aeronautical Materials ›› 2009, Vol. 29 ›› Issue (5) : 61-65.

Preparation and Performance Study of Polyfluorin Thin Film by Radio Frequency Magnetron Sputtering Method

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2009, 29(5): 61-65

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