Preparation of ZrC Film by Transporting Solid ZrCl4 during Low Pressure Chemical Vapor Deposition

LIU Gang;LI Guo-dong;XIONG Xiang;WANG Ya-lei;CHEN Zhao-ke;SUN Wei

Journal of Aeronautical Materials ›› 2011, Vol. 31 ›› Issue (6) : 36-42.

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Journal of Aeronautical Materials ›› 2011, Vol. 31 ›› Issue (6) : 36-42.

Preparation of ZrC Film by Transporting Solid ZrCl4 during Low Pressure Chemical Vapor Deposition

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2011, 31(6): 36-42

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