Research Progress on Measurement Methods and Influence Factors of Thin-film Stress
Yibo MA, Mu CHEN, Yue YAN, Weiming LIU, Youxiu WEI, Xiaofeng ZHANG, Jiaming LI
Journal of Aeronautical Materials . 2018, (1): 17 -25 .  DOI: 10.11868/j.issn.1005-5053.2017.000126