Research Progress on Measurement Methods and Influence Factors of Thin-film Stress
MA Yibo, CHEN Mu, YAN Yue, LIU Weiming, WEI Youxiu, ZHANG Xiaofeng, LI Jiaming
Journal of Aeronautical Materials . 2018, (1): 17 -25 .  DOI: 10.11868/j.issn.1005-5053.2017.000126